Simulated SAM A-scans on multilayer MEMS components
نویسندگان
چکیده
منابع مشابه
Simulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method
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Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...
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عنوان ژورنال:
- Microelectronics Reliability
دوره 42 شماره
صفحات -
تاریخ انتشار 2002